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发明名称
摘要
申请公布号
JPS5623936(U)
申请公布日期
1981.03.04
申请号
JP19790105506U
申请日期
1979.07.31
申请人
发明人
分类号
G03F1/00;G03F1/54;H01L21/027;H01L21/30;H01L21/308
主分类号
G03F1/00
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代理人
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