APPARATUS FOR ULTRA-HIGH VACUUM IN SITU THIN FILM STUDIES

摘要

A thin film fabricating and test apparatus has a substrate holder cart positioned on a pair of tracks within a tubular vacuum system. Feed through drive units operate to move the cart to positions adjacent deposition units and test units within the vacuum system. A second drive unit positions the cart and moves masks and test contacts to a position adjacent substrate. A third drive unit positions deposition control shutters adjacent the substrate.