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发明名称
EINRICHTUNG ZUM LESEN VON MUSTERN
摘要
申请公布号
DE3029827(A1)
申请公布日期
1981.02.26
申请号
DE19803029827
申请日期
1980.08.06
申请人
CANON K.K.
发明人
SUZUKI,AKIYOSHI
分类号
G01B11/00;G03F9/00;H01L21/027;H01L21/30;(IPC1-7):G03F9/00;G02B27/10;G01N21/21
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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