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发明名称
摘要
申请公布号
JPS569018(B2)
申请公布日期
1981.02.26
申请号
JP19730091990
申请日期
1973.08.15
申请人
发明人
分类号
H01L47/02;H01L21/60;H01L23/12;H01L23/48;H01L29/864;H01L47/00
主分类号
H01L47/02
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