| 摘要 |
PURPOSE:To form transparent, excellently crystallized, high quality BeO film, by spraying oxygen and partly ionized metallic Be vapor so as to collide with a substrate. CONSTITUTION:Metallic Be 3 is filled in a crucible 1 and is melted by rhe operation of a heater 4 to form metallic Be vapor 3a. A substrate 12 made of material which is insoluble in water or in org. solvent (saphire, NaCl) is arranged in a vacuum vessel which is evacuated to <=10<-2> atm., hence the metallic Be vapor 3a spouts out of the crucible 1 through a nozzle 2 because of the pressure difference, forming vapor stream 3b flying toward the substrate 12. The vapor stream enters an ionizing chamber 6, where it is partly ionized by the irradiation of electron beam, accelerated by an electric field to increase its kinetic energy thereby forming a mixture with oxygen by including oxygen which exists on the passage. The mixture collide with the substrate 12 to form BeO film 20. |
