Apparatus for the performance of chemical processes

摘要

An improved apparatus for the performance of chemical processes having a reaction chamber with an open end, a reaction cell mounted within the chamber and having a substantially cylindrical interior wall in which is formed an annular groove, and means for spinning the cell about its axis to distribute a chemical compound on the interior wall as a thin film, which includes a closure member mounted for rotation about an axis displaced from the axis of the cell, and a fluid conduit extending through the closure member and terminating at an inner end within the cell for the withdrawal of fluid therefrom. The inner end of the conduit is displaced from the axis of rotation of the closure member and is positioned substantially opposite the annular groove such that it is actuable for adjustment between a first location displaced radially from the annular groove and a second location substantially within the groove by rotation of the closure member through a preselected angle.