| 发明名称 |
PHOSPHORUS-NITROGEN-OXYGEN COMPOSITION AND METHOD FOR MAKING SUCH COMPOSITION AND APPLICATIONS OF THE SAME |
| 摘要 |
<p>A composition is described which comprises amorphous phosphorusnitrogen-oxygen material having excellent thermal stability and low reactivity to a wide variety of chemicals. The material is manufactured using a chemical vapor deposition process. The reaction chamber is maintained at a temperature between about 400-900.degree.C with a suitable substrate placed therein. Reaction gases containing phosphorus-nitrogen-bearing compounds and a source of oxygen are passed through the chamber to deposit the phosphorus-nitrogen-oxygen film onto the substrate.</p> |
| 申请公布号 |
CA1096136(A) |
申请公布日期 |
1981.02.24 |
| 申请号 |
CA19780297675 |
申请日期 |
1978.02.24 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LI, PEI-CHING |
| 分类号 |
H01L29/73;C23C16/30;H01L21/205;H01L21/225;H01L21/28;H01L21/311;H01L21/314;H01L21/318;H01L21/331;H01L21/8247;H01L29/51;H01L29/788;H01L29/792;(IPC1-7):05D5/12;01B25/12 |
主分类号 |
H01L29/73 |
| 代理机构 |
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