| 发明名称 |
ELECTROCONDUCTIVE SI3N44C TYPE NONCRYSTALLINE MATERIAL BY CHEMICAL GAS PHASE DEPOSITION AND ITS MANUFACTURE |
| 摘要 |
Electrically conductive Si3N4-C series amorphous material having excellent thermal and mechanical characteristics is produced in a massive size by chemical vapor deposition. |
| 申请公布号 |
JPS5617988(A) |
申请公布日期 |
1981.02.20 |
| 申请号 |
JP19790093942 |
申请日期 |
1979.07.24 |
| 申请人 |
HIRAI TOSHIO;GOTOU TAKASHI |
发明人 |
HIRAI TOSHIO;GOTOU TAKASHI |
| 分类号 |
C01B21/082;C04B41/50;C04B41/87;C23C16/22;C23C16/30;C23C16/34;C23C16/36;C23C16/56;H01B1/18 |
主分类号 |
C01B21/082 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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