| 发明名称 |
PROCEDIMIENTO PARA EL TRATAMIENTO DE DESGASTEQUIMICO O ELEC-TROMAGNETICO SELECTIVO DE ZONAS SELECCIONADAS DE LA SUPERFI-CIE DE UNA PRESA DE TRABAJO. |
| 摘要 |
<p>A method for high resolution maskless chemical and electrochemical machining is described. Preferential etching results from exposing those regions where machining is sought to an energy beam. Such exposures can increase the ething rate in the case of electrochemical machining by a factor of 103 to 104. Such enhancement is sufficient to make masking unnecessary.</p> |
| 申请公布号 |
ES491228(D0) |
申请公布日期 |
1981.02.16 |
| 申请号 |
ES19280004912 |
申请日期 |
1980.05.07 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
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| 分类号 |
H05K3/06;B23K26/12;C23F1/02;C23F4/00;C25F3/14;H01L21/306;H01L21/3213;H05K3/22;(IPC1-7):25F5/00;23K26/06 |
主分类号 |
H05K3/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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