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经营范围
发明名称
PLASMA CLEANING METHOD
摘要
申请公布号
JPS5615044(A)
申请公布日期
1981.02.13
申请号
JP19790090365
申请日期
1979.07.18
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
HORIIKE YASUHIRO;SHIBAGAKI MASAHIRO;YAMAZAKI TAKASHI
分类号
H01L21/302;H01L21/3065;(IPC1-7):01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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