| 摘要 |
PURPOSE:To enhance the deposition yield on a target by atomizing liq. starting materials by ultrasonic vibration after which the atomized particles are mixed with gas contg. oxygen and hydrogen, burned, and hit on the target. CONSTITUTION:The atomization of liq. starting materials for a glass composition is controlled by changing the quantity of electric energy to increase the amount of the materials atomized without raising gas pressure. For example, liq. starting materials fed to front edge 13 of vibration magnifying horn 2 from feeder 5 through feed pipe 6 are converted into fine particles by vibration with ultrasonic vibrator 1, and the particles are spouted from nozzle 7' with H2 gas of arrow 10. The H2 gas is ignited in nozzle 7' and burned to generate flame 16 contg. glass soot forward together with inert gas and oxidizing gas from triple-tubed nozzles 8', 9'. By spraying flame 16 upon target 18 rotating in the arrow 20 direction and moving in the arrow 19 direction, glass soot 17 is deposited on target 18. |
