| 摘要 |
PURPOSE:To enhance the adhering performance between the coated films by performing the coating process and then the film deleting process successively, thus increasing the reliability. CONSTITUTION:Input/output transducer forming film 12 is coated on the upper surface of wafer 11 made of the piezoelectric material. Then electrode terminal forming film 13 is coated on film 12 in stripes having the necessary width and space. Then the exposed area of film 12 is deleted selectively to form input/output transducers 2 and 3 puls connecting conductor 5. And then film 13 is eliminated selectively to form electrode terminal 4 which is connected to one end of connector 5. After this, wafer 11 is cut to form plural numbers of filter chips 6. In such way, the necessary processes are performed in succession, and thus no contamination remains on the coated film to enhance the adhering performance between the coated film. As a result, the reliability of the product can be increased. |
