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经营范围
发明名称
PROBE UNIT
摘要
申请公布号
JPS5611361(A)
申请公布日期
1981.02.04
申请号
JP19790086691
申请日期
1979.07.09
申请人
FUJITSU LTD
发明人
OKADA NOBUHIDE
分类号
G01R1/06;G01R1/073;G01R31/28;H01L21/66
主分类号
G01R1/06
代理机构
代理人
主权项
地址
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