Dry etching of metal film.,申请号EP19800302564-传众专利搜索

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发明名称	Dry etching of metal film.
摘要
申请公布号	EP0023429(A2)	申请公布日期	1981.02.04
申请号	EP19800302564	申请日期	1980.07.28
申请人	FUJITSU LIMITED	发明人	TAKADA, TADAKAZU;TOKITOMO, KAZUO;HOSHINO, HITOSHI
分类号	C23F4/00;H01L21/02;H01L21/3213;(IPC1-7):H01L21/30;H01L21/31;C23C15/00	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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