| 摘要 |
PURPOSE:To carry out a side range surface analysis and a long line analysis at high precision through a simple constitution by allowing a measuring head in which spectrometric and detecting systems are incorporated to slide in parallel with the direction in which an electron beam is scanned. CONSTITUTION:A measuring head 23 in which an X-ray spectroscope consisting of a collimator and a spectral crystal and an X-ray detector of proportional counter are incorporated is mounted slidably on guide shafts 27, 28 provided horizontally between side frames 25, 26 in parallel with the direction in which an electron beam 2 is scanned and is driven so slidably by a threaded feed shaft 29. A scanning coil 4 is driven by an output of a saw tooth wave generating circuit 21 through a driving circuit 22 to such the electron beam 2, the threaded feed shaft 29 is turned through a servo circuit 31 and a servomotor 30, the measuring head 23 travels to follow a move of a point whereat the electron beam is applied, a scanning width of the electron beam is enlarged, and thus an accurate measurement is secured covering the overall scanning area. |
