发明名称 PHOTOSENSITIVE COMPOSITION
摘要 <p>K-2486 PHOTOSENSITIVE COMPOSITION This invention relates to a photosensitive composition comprising an ester or an amide of an o-naphthoquinone diazide sulfonic or carboxylic acid and, based on the amount of this compound, about 1 to 50 per cent by weight of an organic dye capable of salt formation and about 5 to 75 per cent by weight of a photosensitive halogen-containing compound which releases acid upon exposure to light and having one of the genera| formulae I or II I II in which Ra is an aryl group or a heterocyclic group which may be substituted, Rb is a trihaloalkyl group or a trihaloalkenyl group having from 1 to 3 carbon atoms, and n is 1, 2 or 3.</p>
申请公布号 CA1094379(A) 申请公布日期 1981.01.27
申请号 CA19770286370 申请日期 1977.09.09
申请人 HOECHST AKTIENGESELLSCHAFT 发明人 STAHLHOFEN, PAUL
分类号 G03C1/72;G03C5/00;G03F7/004;G03F7/022;G03F7/105;H01L21/027;(IPC1-7):03C1/52 主分类号 G03C1/72
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