| 摘要 |
PURPOSE:To measure a two-dimentional distribution of inclusions on the sample surface by applying an electron beam selected within the limit of 0.1-10mm. in diameter to a sample in a vacuum container, and spreading the X-rays released. CONSTITUTION:An electron beam EB is applied to the surface of a sample 5, and the X-rays released are spread by a plane crystal 30, and applied to an X-ray spectroscope 7c comprising a X-ray detector 31 converting the spread X-rays into electric signals and an amplifier 32. The electron beam EB applied to the sample 5 excites inclusions 33, Fe, S, P and the like in the sample 5 to generate characteristic X-rays, Fe-Ka and S-Ka, the S-Ka being detected by a X-ray spectroscope 7c and the Fe-Ka being detected by a X-ray spectroscope 7e comprising a plane crystal 34, X-ray detector 35, and amplifier 36. The X-ray spectroscope 7c is for elementary analysis of the inclusions 33, and the X-ray spectroscope 7e is for detecting a crack 37 of approximately 1mm.. The two-dimentional distribution of inclusions is detected by successively scanning the sample 5, with it moved. |
