| 摘要 |
PURPOSE:To take a multipoint measurement accurately and speedily by measuring an X-Y table so that a shift in measurement point is made successively according to a predetermined procedure, and measuring the thickness of a body to be measured from the table surface. CONSTITUTION:A suction groove is formed in the table surface 12 of the X-Y table 11 and the body 14 to be measured is fixed suctionally through the suction groove. The circumference of the objective body 14 is pressed against the table surface 12 with pressing force. Then, the thickness of the objective body 14 at a measurement point 14A is measured by the measure 47 of a displacement detector 41. The X-Y table 11 is moved so that the measurement point is shifted successively according to the predetermined procedure. |
