| 摘要 |
PURPOSE:To detect the two-dimentional distribution of inclusions and a crack in a slab sample at the same time by using X-rays released by applying an electron beam selected within the limit of 0.1-10mm. in diameter to the sample in a vacuum. CONSTITUTION:An electron beam EB is applied to the surface of a sample 5. An X-ray spectroscope 7c comprises a plane crystal 30 spreading X-rays radiated from the sample 5, an X-ray detector 31 converting the spread X-rays into electric signals, and an amplifier 32. The electron beam EB applied to the sample 5 excites inclusions 33, Fe, S, P, and the like in the sample 5 to generate characteristic X-rays, which are detected by a X-ray spectroscope 7c comprising a plane crystal 34, an X-ray detector 35, and an amplifier 36, and the X-ray spectroscope 7c also detects a crack 37 of approximately 1mm.. With the sample 5 moved by the sample table in the direction of X and Y, the two-dimentional distribution of inclusions and the existence of a crack can be detected. |
