| 摘要 |
PURPOSE:To simplify the mechanism as well as facilitate the automation for the pattern tester, by supplying the pattern picture of the fixed position to the deciding unit at all times although the objective to be tested may be put in any direction on the turntable. CONSTITUTION:The start signal is generated for the period during which the front edge of specified region 3 of the objective to be tested 2 on turntable 1 turns round the section of angle alpha ranging from the position which enters the viewfield of specified region detector 6 to the position which enters the viewfield of nonspecified region detector 7. In this connection, the pattern picture signal at the steady position on the objective 2 can always be supplied to the deciding unit by deciding the position of camera 4 based on the position of detector 6. |
