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发明名称
摘要
申请公布号
JPS567642(U)
申请公布日期
1981.01.23
申请号
JP19790085982U
申请日期
1979.06.25
申请人
发明人
分类号
B24B27/06;B28D1/06;B28D1/22;H01L21/02;(IPC1-7):B24B1/02
主分类号
B24B27/06
代理机构
代理人
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