| 摘要 |
<p>PURPOSE:To make manufacture easy and achieve manpower saving by forming patterns by the mask elements having different spectral transmittances or reflectances and radiating with different beams thereby giving the specified pattern exposure in the manufacture of the color filter of the specified patterns used for video cameras, etc. CONSTITUTION:At the time of making a mosaic filter of, for example, red and green, on the wafer of an image pickup element such as CCD, a substrate 3 evaporated with sublimatable dyes of a red or green color with its evaporated side being faced downward is closely contacted on the wafer 4 and is so registered that the elements of the mask 1 and the CCD elements oppose. Light of an Ar laser 11 is projected onto the substrate 3 by way of a galvano mirror 7, a mask 1 and condenser lenses 5, 6 and is scanned by way of the mirror 7 and a motor 18 by a control system 28, by which the red-color patterns evaporated with the red-color dyes on the CCD are made. Similarly, blue-color patterns are made by using an He-Ne laser 12. Hence, the process is simple and the saving of labor for mask registering may be accomplished.</p> |
