| 摘要 |
PURPOSE:To make a secure and easy check by sorting defective semiconductor pellets by irraidating defective pellets of a semiconductor wafer, having an appended mark including a fluorescent substance, with ultraviolet rays, and by detecting fluorescent light emitted from the fluorescent substance. CONSTITUTION:On semiconductor pellet 1a that has beed found to be defective by a wafer test among semiconductor pellets 1a, mark 5 including a fluorescent substance made of Zn2SiO4:Mn is appended. The surface of semiconductor pellet 1a is irradiated with ultraviolet rays of short wavelength from irradiating method 6. Consequently, mark 5 emits fluorescent light, which is detected by detecting method 7, whose output is input to processor 8. |
