| 摘要 |
PURPOSE:To form a uniform film over large area by placing a movable supporter and wiry discharge electrodes in an evacuated deposition chamber in parallel with each other, introducing a reactive gas, and inducing discharge. CONSTITUTION:A film having uniformity in its physical characteristics and thickness is formed over large area with high reproducibility. For example, deposition chamber 103 is internally provided with beltlike supporter 107 which is automatically coiled with roller 108, earth side flat plate electrode 109, gas supplying means 110, many wiry discharge electrodes 111 regularly arranged between means 110 and supporter 107 in parapllel with supporter 107, and heater 112. Chamber 103 is evacuated to a predetermined vacuum degree from vacuum hole 106, and a reactive gas is supplied into chamber 103 from many holes of means 110. Glow discharge is induced between the electrodes to convert the internal gas into plasma, thereby forming a film on supporter 107. Roller 108 successively coils supporter 107 so that the film forming surface of supporter 107 is moved relatively to wiry electrodes 111. |
