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发明名称
POSITION DETECTION MARK
摘要
申请公布号
JPS565587(A)
申请公布日期
1981.01.21
申请号
JP19790080146
申请日期
1979.06.27
申请人
ANRITSU ELECTRIC CO LTD
发明人
KAWAKAZU SHIGENOBU;KUBOTA MICHINORI;ABE TAKAYUKI
分类号
G09F11/22;G09F11/295
主分类号
G09F11/22
代理机构
代理人
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地址
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