发明名称 SPECTROMETER
摘要 PURPOSE:To realize the shortening of a measuring time and the enhancement of measuring accuracy, by allowing selected lights different in a wavelength scanned by the shaking of a light selection means to transmit through a plurality of emitting slits to be always incident to a plurality of detection mechanisms. CONSTITUTION:Incident light 4 reaches a diffraction lattice 5 through an incident slit 1, a concave mirror 2 and a flat mirror 3 and lights different in a wavelength constituting the incident light 4 are diffracted at angles different corresponding to wavelengths and split into a plurality of selected lights 8 to reach a light blocking part 9 through a concave mirror 7. At this time, the arrival positions of the selected lights 8 to the light blocking part 9 are changed with the elapse of time by the shaking of the diffraction lattice 5 and the wavelength regions of the selected lights 8 transmitting through the emitting slits S1, S2, S3 of the light blocking part 9 are changed in respectively different ranges with the elapse of time and said lights 8 are incident to optical sensors PS1, PS2, PS3. Because the selected lights 8 of each wavelength region are always incident to the optical sensors PS1-PS3 during the scanning by the shaking of the diffraction lattice 5, incident quantity increases and measuring accuracy is enhanced.
申请公布号 JPS62144031(A) 申请公布日期 1987.06.27
申请号 JP19850282877 申请日期 1985.12.18
申请人 HITACHI LTD 发明人 ICHIKAWA KAZUYA;OKABE TSUTOMU
分类号 H01L21/302;G01J3/02;G01J3/18;G01J3/433;H01L21/3065 主分类号 H01L21/302
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