| 摘要 |
PURPOSE:To improve the sensitivity and the distance resolution by forming a prescribed number of quadrilateral unit elements in which length of opposed sides is equal, in plural lines and (n+1) rows so as to be adjacent, respectively in a semiconductor substrate and forming them by shifting the center point of the unit element of a second row and thereafter in the row direction by 1/n each against the center point of the unit element of the previous row. CONSTITUTION:Unit elements of a regular square for constituting a unit element aggregate are arranged in plural lines and (n+1) rows, and the elements of the second row and thereafter are formed by shifting them by 1/n each against the adjacent element, respectively. Subsequently, in a cylindrical area A of diffracted X rays 5 which are reflected from a sample 4 and have a radius being equal to width D, said detecting element is opposed to the sample 4 and provided by allowing the vertical direction of each row of the elements and the width direction of the X rays 5 to coincide with each other. Accordingly, the X rays 5 are received by a strip element train of 0.2mm width, and the sensitivity and the distance resolution can be raised without rotating the whole detecting element on the area A. |
