| 摘要 |
PURPOSE:To improve a bonding property and a resin seal-up heat resisting property, by bonding a wire while blowing clean gas onto a pellet in a baking process to forcedly exhaust gas produced from silver paste. CONSTITUTION:When silver paste is heated, various kinds of gas are produced and are likely to contaminate an Al pad and greatly reduce wire bonding strength. If the gas adheres to the surface of a pellet and stays on the boundary between the surface and resin, humidity resistance deteriorates. To eliminate such disadvantages, nozzles 11 for ejecting clean air are provided in a heating furnace 9. The clean gas is blown onto the top of a lead frame 1 passing. Undesirable gas is sucked through numerous suction holes 14 under and alongside a chute 8 and exhausted through 13. Bonding is effected in such environment. As a result, the reliability of bonding property and humidity resistance is enhanced. |
