发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To perform sealing-up with a crystalline glass whose main constituents are ZnO, B2O5 and SiO2, by changing a medium comprising diethylene glycol dibutyl ether and isobutyl methacrylate ester into ash or splashing the medium at a temperature not higher than the softening point of the crystalline glass. CONSTITUTION:2-50wt% of isobutyl methacrylate is dissolved in diethylene glycol dibutyl ether. The solution is kneaded with a crystalline glass whose main constituents are ZnO, B2O3 and SiO2 to prepare printing ink. The molecular weight of the isobutyl methacrylate is set at 10<6> or less so that changing to ash and splashing are facilitated, the quantity of residual carbon is reduced and the electric properties of a semiconductor device are not deteriorated. The viscosity of the ink is adjusted to about 1.5-5X10<4> cp. The ink is printed on a P-N junction. The printed ink is maintained at the softening point of the glass for about 5-30min. As a result, no bubbles and pinholes are produced, glass projections are greatly decreased, following work is facilitated, pattern accuracy is enhanced and production yield is improved.
申请公布号 JPS564239(A) 申请公布日期 1981.01.17
申请号 JP19790079741 申请日期 1979.06.26
申请人 HITACHI LTD 发明人 TAKAHASHI MASAAKI;MISAWA YUTAKA;YATSUNO KOUMEI
分类号 H01L51/05;H01L21/316;H01L21/331;H01L29/73;H01L51/40 主分类号 H01L51/05
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