| 摘要 |
PURPOSE:To adjust the position of a shield in a vacuum chamber without need for returning its vacuum state to the atmospheric pressure and thus to save the time which would otherwise be required to regain the vacuum state, by providing means adapted to adjust the position of the shield from the outside of the vacuum chamber. CONSTITUTION:The position of a shield 15 can be adjusted only in the lengthwise direction A of a panel from the outside of a chamber 11c adapted to deposit in vacuo a thin film of a heat-absorptive material. Means 20 adapted to adjust the position of the shield 15 includes a rod 16 supporting the shield 15, a manipulation rod 17 coupled with the rod 16 via a gear mechanism 21, and a manipulation wheel 18 provided at the outer extremity of the rod 17. The position of the shield 15 is adjusted along the lengthwise direction of the panel by rotating the wheel 18 while watching the shield 15 through a peep window 19. This eliminates the need for returning the vacuum state of the chamber 11a to the atmospheric pressure for the adjustment of the location of the shield and saves the time which would otherwise be required to regain the vacuum state. |
