| 摘要 |
PURPOSE:To obtain an easy-to-handle optical memory disk which is stable mechanically and chemically along with a high sensitivity and a long life time, by turning the Te film formed on the disk substrate into the Te oxide composite film through the forced oxidation. CONSTITUTION:The Te thin film is coated on substrate 1 of glass or the like and then oxidized in the oxidizing atmosphere to secure the 3-layer structure for the surface layer: TeO2 film 13 at about 50Angstrom ; low-class tellurium oxide layer 14 (TeOx:x<2) at about 10Angstrom under film 13; and Te layer 15 secured under layer 14 respectively. This composite film 12 is set to about 300Angstrom as a whole. For the manufacture of the memory disk, substrate 11 is attached to rotary mechanism 6 within the vacuum vapor deposition device. And Te17 is put into evaporation dish 18, and the Te is evaporated by heater 19. Then substrate 11 is turned to be vapor-deposited. The vapor-deposited disk 11 is sent to ultraviolet ray irradiator 21 via convayor mechanism 20, and then Te film surface 15 is irradiated to be oxidized in the oxidizing atmosphere such as the air or the like and with the heat treatment up to about 100 deg.C by heater device 22. The composite film with the surface which is stable both mechanically and chemically is stable when it is recorded, used and preserved respectively, thus avoiding the lowering of the recording sensitivity and the S/N deterioration. |
