| 摘要 |
PURPOSE:To improve performance of the vibrating unit having interdigital electrodes, by cutting a crystal piezoelectric substrate with parallel surface and reverse face at a prescribed angle and by setting the radiant angle and the reflection angle of the vibration wave to prescribed angles respectively. CONSTITUTION:A crystal piezoelectric substrate with parallel surface and reverse face is cut out by rotation from the Y-axis at thetaR=-10--30 deg.. The -Z face is selected as the surface, and the direction from the Y-axis at thetaAT=30-45 deg. is selected as the direction connecting centers of transmission interdigital electrodes 14 and 15 and slip wave reflection point 18 on the reverse face, and the direction from the Y-axis at thetaBT=-45-60 deg. is selected as the direction connecting reflection point 18 and centers of receiving interdigital electrodes 16 and 17. By this constitution, this unit is superior in frequency temperature characteristic and can oscillate a high frequency and can adjust the delay time, and thus, a high-performance slip wave vibtating unit can be obtained. |
