| 摘要 |
PURPOSE:To make to enable all kind of testers to describe a position distribution figure of measured informations by a method wherein the IC tester receives position signals from a semiconductor wafer prober, the informations of the IC tester corresponding to those positions are converted by an A/D converter and are stored at corresponding positions. CONSTITUTION:When a wafer is measured in a prober 1, pulses corresponding to the measured points are generated and the coordinates are counted in a device 7. The characteristic of wafer is measured in a device 2 and is treated with the A/D conversion in a device 8, coordinates are designated in a device 7, measured values corresponding to the coordinates are supplied from the device 8 and are stored in a device 9 in digital value forms. By operating an information readout function 4, a position distribution figure 5 of the measured values 6 can be described conforming to the contents of memory in the device 9 through a sequence 3 of IC tester. Using this method, any kind of IC tester can be made to describe the position distribution figure of measured values. |
