| 摘要 |
A method for controlling the course of a floating melting zone process, in which a melting zone is electromagnetically induced in a semiconductor rod includes the steps of monitoring the r.f. frequency of the signal applied to induce heating in the rod, monitoring the voltage drop across the induction heating coil, and monitoring the current drawn by the r.f. generator, and controlling, in response to these three variables, the frequency of the signal and the velocity at which the silicon rod is pulled, in order to bring all three of the independent variables into agreement with desired values, to produce a rod of a constant desired diameter. |
