| 摘要 |
PURPOSE:To increase the piezoelectric constant and coupling coefficient of a composite piezoelectric film by forming a composite piezoelectric film of inorganic ferrodielectric particles and high molecular material, forming the shape of particles in central-expanded cylindrical shaped, and forming the upper and the lower surfaces thereof for the front and the back surfaces of the film. CONSTITUTION:Resin solution becoming high molecular material matrix on a flat substrate is flowed and spreaded, inorganic ferrodielectric particles having spherical shape and uniform grain size are so dropped that the particles are not superimposed in thickness direction of the solution to form a composite resin solution. At this time the particles always reach the substrate due to their specifid gravity difference. Thereafter, the solution is dried to form a plurality of sheetlike member and to be isolated from the substrate. The front and the rear surfaces thereof are lapped to form the surfaces of the film with the upper and the lower surfaces of the particles 1a to bury the particles 1a in the high molecular material 1b. Then, an electrode 1c is arranged on the surface of the exposed particles 1a to form a composite piezoelectric film 1. In this manner preferable characteristics are provided with flexibility in the film. |
