VERFAHREN ZUM ZERSAEGEN VON STABFOERMIGEN WERKSTUECKEN IN SCHEIBEN MITTELS INNENLOCHSAEGE, SOWIE INNENLOCHSAEGEN ZU SEINER DURCHFUEHRUNG

摘要

When cutting rod-shaped workpieces into discs using an internal hole saw, the saw blade often deviates from its desired position in the axial direction during the sawing operation, which ultimately leads to products with geometric defects. According to the invention, the deviation can be compensated for by the workpiece and the clamping system of the saw blade performing an appropriate translatory axial relative movement in accordance with the measured deviation. This movement is conveniently controlled via a computer which compares the actual position and the desired position of the saw blade with one another. The method can be used in particular in the sawing of semiconductor rods.