| 摘要 |
PURPOSE:To improve the position accuracy of the stator pole by forming stator- shaped magnetic metal film on the nonmagnetic plate. CONSTITUTION:The magnetic metal film is shaped in a stator to form a pair of stators 4a and 4b, for example. For the aforementioned magnetic metal, used are strong magnetic metal such as Fe, Co, Ni or alloy such as permally. For film formation, applied are methods including vacuum evaporation, printing plating sputtering, ion plating. In this manner, the position accuracy of the stator poles 4c and 4d formed on the pair of stators 4a and 4b depends on the accuracy in the film formation of the magnetic metal with respect to the nonmagnetic plate thereby ensuring its higher positioning accuracy. |
