| 摘要 |
PURPOSE:To make it possible to inspect even the MTF of an vectorial angle parallel with an array simply and rapidly with a high precision, by moving the condensing light transmission material array, which is interposed between a frequency chart and a solid scanning element, in the array longitudinal direction. CONSTITUTION:Frequency chart 10 and solid scanning element 11 are arranged oppositely to each other, and the noninverted equal-size image of chart 10 is focused onto the light receiving region of element 11 by condensing light transmission material array 2. First, lamp 41 of illumination system 4 is lit, and charg 10 is illuminated by the dispersed light, and the noninverted equal-size image of chart 10 is focused onto the light receiving region 11 of element 11. Next, element 11 is driven by control circuit 13 to cause element 11 to perform self-scanning, and then, a time series electric signal changing according to the chart image on the light receiving region is obtained. This electric signal is applied to operating circuit 12, and an MTF is calculated according to the predetermined operation expression by circuit 12, and the calculation value is displayed on display equipment 8. |
