发明名称 Magnetic field generator for use in sputtering apparatus
摘要 Apparatus for generating a uniform magnetic field in a cylindrical oriented post cathode. The vacuum chamber has a cylindrical wall of non-magnetic material and end walls of magnetic material. An array of bars of magnetic material is disposed to surround the vacuum chamber and to form a magnetic circuit including the end walls of the chamber and a region extending through and adjacent to the post cathode. Solenoid windings are positioned between the cylindrical wall of the chamber and the bars of magnetic material.
申请公布号 US4243505(A) 申请公布日期 1981.01.06
申请号 US19790049455 申请日期 1979.06.18
申请人 TELIC CORPORATION 发明人 PENFOLD, ALAN S.
分类号 H01J37/34;(IPC1-7):C23C15/00 主分类号 H01J37/34
代理机构 代理人
主权项
地址