| 摘要 |
1438559 Sintered composite insulating & conducting layers HITACHI Ltd 25 July 1973 35530/73 Heading C7D A composite sintered structure which may be used in an integrated semi-conductor circuit device is made by depositing at least one layer of a green ceramic insulating paste 4 and at least one layer of a green ceramic conductor paste 2 on a green ceramic sheet I consisting of the same ceramic as the insulating paste and sintering the composite e.g. at 1450-1650‹C in a reducing or inert atmosphere. The ceramic used in the pastes and sheet is preferably 88-95% Al 2 O 3 the balance mineralizers such as S i O 2 and MgO. The conducting paste contains 50-70% W, Ti or Mo and the preferred binder for the pastes and sheet is polyvinyl butyral. |
