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经营范围
发明名称
METHOD AND DEVICE FOR CLEANING SOLID BODY SURFACE
摘要
申请公布号
SU792359(A1)
申请公布日期
1980.12.30
申请号
SU19792755116
申请日期
1979.04.12
申请人
INST ELEKTRONIKI AN BRUSS SSR
发明人
KOLESHKO VLADIMIR M,SU;GULAJ ANATOLIJ V,SU;KRIVONOSOV SERGEJ S,SU
分类号
H01L21/306;H01L21/02;H05K3/00;(IPC1-7):H01L21/02
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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