发明名称 Phenol-free photoresist stripper
摘要 Stripping solutions, free from phenol compounds, comprising at least 30 weight percent of an unsubstituted or alkyl substituted aryl sulfonic acid have been found effective for removal of organic polymeric substances from inorganic substrates. The novel compositions comprise 30-80 percent of one or more of the sulfonic acids in admixture with chlorinated aryl compounds, alkylaryl compounds having 1-14 alkyl carbons, an isoparaffinic hydrocarbon, or mixtures thereof.
申请公布号 US4242218(A) 申请公布日期 1980.12.30
申请号 US19760740154 申请日期 1976.11.08
申请人 ALLIED CHEMICAL CORP 发明人 MEY, JOHN E VANDER
分类号 H01L21/30;C11D1/22;C11D3/34;C11D3/43;G03F7/00;G03F7/42;H01L21/027;(IPC1-7):C23G5/02;G03C11/12 主分类号 H01L21/30
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