| 摘要 |
<p>PURPOSE:To effectively decrease the quantity of cleaning gas required in a cleaning process by changing the pressure of cleaning gas flowing from a product gas storage tank to an adsorber on a cleaning process by the operation of a valve on the outlet side of the adsorber. CONSTITUTION:A valve 11 is opened with a valve 15 located on the outlet side of cleaning gas of an adsorber 3a being closed (gas feed operation). Thereby gaseous CO with high pressure and high concentration in a product gas storage tank 5 flows into the adsorption tower 3a under about the atmospheric conditions to increase the pressure in the adsorption tower 3a. In a state where this pressure is equal to that in the product storage tank 5, the flow of the gaseous CO is stopped. When the gas flow is stopped, the valve 11 is opened and the valve 15 is closed this time (gas discharge operation). Thereby gas accumulated in the adsorption tower 3a is discharged from it to an adsorption tower 3b to decompress the adsorption tower 3a. When the pressure of the adsorption tower 3a is about atmospheric one, gas discharge is stopped. At this time, the above gas feed operation is performed again.</p> |
