| 摘要 |
PURPOSE:To directly read the magnification of two or more directions by displaying at least two-direction magnification display on the same scanning image. CONSTITUTION:The electron rays 1 are deflected by the X deflection coils 2a and 2b and the Y deflection coils 3a and 3b and the surface of the sample 5 is two- dimensionally scanned. The secondary electron 6 is detected by the secondary electron detector 7, amplified by the video amplifier 18, and used as the brightness modulation signal of the CRT12. The magnification scale display circuit 15 receives the signal from the X-magnification setting circuit 10 and the Y-magnification setting circuit 11, sets each magnification scale, and is guided to the blanking circuit 17. The sample inclination mechanism 16 guides the signal corresponding to the inclined angle of the sample 5 to the magnification display circuit 15, compensates the magnification which is varied depending upon the sample inclination, and determines the magnification scale length. |
