INSPECTION APPARATUS WITH IMPROVED DETECTION OF SURFACE DEFECTS OVER LARGE AND CURVED SURFACES

摘要

A surface defect inspection apparatus includes a light radiation source, arranged to oppose a surface to be inspected serving as a mirror surface, for radiating light having a predetermined change pattern toward the surface to be inspected, a camera mechanism for receiving an image of the light radiation source, reflected by the surface to be inspected and forming a received-light image corresponding to the change pattern of the light radiation source, and a discriminator for discriminating a surface defect portion on the surface to be inspected by discriminating a portion whose change pattern is different from the change pattern on the basis of the received-light image formed by the camera mechanism.