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发明名称
摘要
申请公布号
JPS55181339(U)
申请公布日期
1980.12.26
申请号
JP19790080485U
申请日期
1979.06.12
申请人
发明人
分类号
C30B25/14;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
C30B25/14
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代理人
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