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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS55165674(A)
申请公布日期
1980.12.24
申请号
JP19790073874
申请日期
1979.06.12
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
NAKAMURA JIYUNICHI;YAMAZAKI IWAO;HATA SEIJI
分类号
H01L21/8224;H01L21/331;H01L27/082;H01L29/08;H01L29/72;H01L29/73;H01L29/735
主分类号
H01L21/8224
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代理人
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