发明名称 ELECTRODE BONDER
摘要 PURPOSE:To substantially eliminate necessity of positional correction of a bonding tool during operating if it is conducted initially. CONSTITUTION:A through hole is provided at an ultrasonic horn 1 mounted with a bonding tool 8 at its end or a blow pipe 11 for blowing cold or hot air is provided near the horn 1, the cold air, the hot air or the air at a constant temperature by the mixture of the cold and hot airs are fed to the hole or the horn 1 or the pipe 11 as required to hold a temperature of the horn 1 constant.
申请公布号 JPH0637155(A) 申请公布日期 1994.02.10
申请号 JP19920189130 申请日期 1992.07.16
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MATSUMURA SHINYA;KABESHITA AKIRA;OJI SHIRO;IMANISHI MAKOTO
分类号 H01L21/607;H01L21/60 主分类号 H01L21/607
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