摘要 |
PURPOSE:To substantially eliminate necessity of positional correction of a bonding tool during operating if it is conducted initially. CONSTITUTION:A through hole is provided at an ultrasonic horn 1 mounted with a bonding tool 8 at its end or a blow pipe 11 for blowing cold or hot air is provided near the horn 1, the cold air, the hot air or the air at a constant temperature by the mixture of the cold and hot airs are fed to the hole or the horn 1 or the pipe 11 as required to hold a temperature of the horn 1 constant. |