发明名称 MANUFACTURE OF SEMICONDUCTOR LIGHT EMITTING ELEMENT
摘要 <p>PURPOSE:To easily form an electrode layer in a semiconductor light emitting element and increase the coating strength thereof by etching the main surface of a light emitting substrate formed with a PN-junction to form a rough surface thereon and then forming an electrode layer thereon to divide it into pellets. CONSTITUTION:The main surface of GaP light emitting substrate formed with a PN-junction is etched with mixed acid solution selected arbitrarily from hydrochloric acid, nitric acid fluoric acid or the like to form rough surface thereon. This rough surface become rugged with an etching depth of several ten order microns. Then, after coating predetermined pattern of metallic electrode layer, the substrate is diced or divided by means such as scribing or the like to form pellets.</p>
申请公布号 JPS55163884(A) 申请公布日期 1980.12.20
申请号 JP19790070148 申请日期 1979.06.06
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 SEKIWA TETSUO
分类号 H01L21/28;H01L21/301;H01L21/306;H01L33/22;H01L33/30 主分类号 H01L21/28
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