Soln. for silicon, tin or titanium oxide film formation - by hydrolysis, contains silicone oil to prevent striation or sun-burst effect

摘要

Film-forming soln., for the prodn. of (un)doped oxide film(s) on a substrate by hydrolysis of a Si, Sn or Ti cpd. in the soln. or by hydrolysis during application to the (semiconductor) substrate, contains silicone oil(s) (I). Striations and sunburst effects are avoided on spin coating and optically uniform films can be produced.